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Published in 2018 at "ChemCatChem"
DOI: 10.1002/cctc.201800227
Abstract: The full exposure of active ingredients plays an important role in the enhancement of catalytic performance. In this work, a series of novel catalysts, Mn−Co mixed oxide nanosheets with ultrathin thickness (about 3.5 nm) and different…
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Keywords:
mixed oxide;
exposure active;
oxide nanosheets;
performance ... See more keywords
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Published in 2019 at "Optics express"
DOI: 10.1364/oe.27.015604
Abstract: Source and mask optimization (SMO) technology based on vectorial image model is indispensable in immersion lithography process at advanced technology node. Many kinds of algorithms have achieved successes in aspect of fast and robust SMO…
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Keywords:
field;
exposure field;
impact;
full exposure ... See more keywords