Design and Optimization of Tool-Embedded Thin-Film Strain Sensor Substrate Structure
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DOI: 10.3390/mi14020355
Abstract: With the intelligent tool cutting force measurement model as the engineering background, the selection, design, and optimization of the substrate structure of the tool-embedded thin-film strain sensor are studied. The structure of the thin-film strain… read more here.
Keywords: structure; function area; substrate structure; design ... See more keywords