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Published in 2021 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2021.3081828
Abstract: The sensitivity and the selectivity are the most significant parameters of any sensor. In this paper, the effect of the coating (functionalization) thickness on the performance associated with the sensitivity of a Micro-Electro-Mechanical-Systems (MEMS) planar…
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Keywords:
functionalization;
functionalization thickness;
creatinine;
thickness ... See more keywords