Functionality Evaluation of Micro-Electro-Mechanical-Systems Sensor for Varied Selective Functionalization Thickness to Determine Creatinine Concentration
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DOI: 10.1109/jsen.2021.3081828
Abstract: The sensitivity and the selectivity are the most significant parameters of any sensor. In this paper, the effect of the coating (functionalization) thickness on the performance associated with the sensitivity of a Micro-Electro-Mechanical-Systems (MEMS) planar… read more here.
Keywords: functionalization; functionalization thickness; creatinine; thickness ... See more keywords