Quantum chemical calculation and growth process of Ga2O3 grown via TEGa under different oxygen sources in MOCVD
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DOI: 10.1039/d3ce00310h
Abstract: Ga2O3, a fourth-generation ultrawide-bandgap semiconductor material, offers a broad range of potential applications in automotive electronics, electrical devices, and other high-power electronic domains. Metal–organic chemical vapor deposition (MOCVD) is an... read more here.
Keywords: chemical calculation; ga2o3 grown; process ga2o3; growth process ... See more keywords