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Published in 2019 at "Superlattices and Microstructures"
DOI: 10.1016/j.spmi.2019.106276
Abstract: Abstract In this paper, two different cleaning methods before nitridation of the Au/GaN/n-GaAs Schottky diodes are investigated. Batch 1 is cleaned chemically and followed by ionic bombardment in an ultra-high vacuum chamber (UHV). On the…
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Keywords:
ionic bombardment;
schottky diodes;
gaas schottky;
gan gaas ... See more keywords
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Published in 2017 at "IEEE Electron Device Letters"
DOI: 10.1109/led.2017.2756920
Abstract: This letter describes a new approach for fabricating quasi-vertical submillimeter-wave GaAs Schottky diodes heterogeneously integrated to high-resistivity silicon substrates. The new method is robust and eliminates previous processing steps that were prone to result in…
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Keywords:
schottky diodes;
gaas schottky;
submillimeter wave;
process ... See more keywords