Feedforward Control Algorithms for MEMS Galvos and Scanners
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DOI: 10.1109/jmems.2021.3074301
Abstract: Optical systems typically use galvanometers (galvos) and scanners. Galvos move, quasi-statically, from one static position to another. Scanners move in an oscillatory fashion, typically at the device resonant frequency. MEMS devices, which have many advantages… read more here.
Keywords: control; galvos scanners; algorithms mems; feedforward control ... See more keywords