Anisotropic mosaicity and lattice-plane twisting of an m-plane GaN homoepitaxial layer
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DOI: 10.1039/c9ce00463g
Abstract: We have observed anisotropic mosaicity of an m-plane GaN homoepitaxial layer by X-ray diffraction topography imaging over a wafer and X-ray rocking curves measured at various wafer points. read more here.
Keywords: plane; gan homoepitaxial; plane gan; anisotropic mosaicity ... See more keywords