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1
Published in 2019 at "Crystal Research and Technology"
DOI: 10.1002/crat.201900129
Abstract: Carbon‐doping of GaN layers with thickness in the mm‐range is performed by hydride vapor phase epitaxy. Characterization by optical and electrical measurements reveals semi‐insulating behavior with a maximum of specific resistivity of 2 × 1010…
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Keywords:
growth properties;
intentionally carbon;
properties intentionally;
carbon ... See more keywords
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Published in 2017 at "Vacuum"
DOI: 10.1016/j.vacuum.2017.01.017
Abstract: Abstract Ga-rich Al x Ga 1– x N ( x « 0.01) (GaN:Al) single-crystalline layers were grown by radio-frequency magnetron sputter epitaxy using N 2 /Ar gas and a 6-N grade AlGa alloy target. When…
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Keywords:
gan layers;
frequency magnetron;
radio frequency;
grown radio ... See more keywords
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Published in 2017 at "Journal of Applied Physics"
DOI: 10.1063/1.4993180
Abstract: Semi-insulating GaN is a prerequisite for lateral high frequency and high power electronic devices to isolate the device region from parasitic conductive channels. The commonly used dopants for achieving semi-insulating GaN, Fe, and C cause…
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Keywords:
carbon;
gan layers;
currents fermi;
level shifts ... See more keywords
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Published in 2019 at "Applied Physics Letters"
DOI: 10.1063/1.5098965
Abstract: We studied deep levels in quartz-free hydride-vapor-phase epitaxy (QF-HVPE)-grown homoepitaxial n-type GaN layers within which three electron and eight hole traps were detected. The dominant electron and hole traps observed in the QF-HVPE-grown GaN layers…
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Keywords:
gan layers;
hole traps;
quartz free;
spectroscopy ... See more keywords
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2
Published in 2023 at "Journal of Applied Physics"
DOI: 10.1063/5.0143985
Abstract: It is highly challenging to grow high-quality gallium nitride (GaN) layers on silicon (Si) substrates due to the intrinsic mismatching of their structural and thermal properties. Aluminum nitride (AlN) interlayers have been used to induce…
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Keywords:
aln interlayer;
strain gan;
layer;
strain ... See more keywords
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1
Published in 2018 at "Semiconductors"
DOI: 10.1134/s1063782618090026
Abstract: The Raman spectra of thick (~100 μm and more) GaN layers grown on crystalline SiC substrates by the sublimation sandwich method are studied. Good agreement between the spectra of the SiC substrates used in the…
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Keywords:
sublimation sandwich;
sandwich method;
gan layers;
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1
Published in 2019 at "Technical Physics"
DOI: 10.1134/s1063784219040054
Abstract: Synthesis of AlN and GaN layers on a Si(100) substrate by chloride vapor-phase epitaxy has been considered. The process includes sulfidizing of the silicon surface, nucleation and growth of an AlN layer, and then formation…
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Keywords:
aln gan;
layers 100;
gan layers;
100 substrate ... See more keywords
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1
Published in 2022 at "Materials"
DOI: 10.3390/ma15196916
Abstract: A set of GaN layers prepared by metalorganic vapor phase epitaxy under different technological conditions (growth temperature carrier gas type and Ga precursor) were investigated using variable energy positron annihilation spectroscopy (VEPAS) to find a…
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Keywords:
growth;
vga concentration;
gan layers;
formation ... See more keywords