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Electrical properties of Si-doped GaN prepared using pulsed sputtering

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Published in 2017 at "Applied Physics Letters"

DOI: 10.1063/1.4975056

Abstract: In this study, we investigated the basic electrical properties of Si-doped wurtzite GaN films prepared using a low-temperature pulsed sputtering deposition (PSD) process. We found that the electron concentration can be controlled in the range… read more here.

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