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Published in 2025 at "APL Materials"
DOI: 10.1063/5.0249739
Abstract: This study presents a comprehensive analysis of the structural and electrical properties of degenerate GaN source–drain AlN/AlxGa1−xN/AlN high electron mobility transistors (HEMTs) fabricated using low-temperature pulsed sputtering epitaxial growth. The investigation encompassed a range of…
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Keywords:
source drain;
alxga1 aln;
gan source;
drain ... See more keywords