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Published in 2022 at "Science and Technology of Advanced Materials"
DOI: 10.1080/14686996.2022.2052180
Abstract: ABSTRACT Understanding the process of oxidation on the surface of GaN is important for improving metal-oxide-semiconductor (MOS) devices. Real-time X-ray photoelectron spectroscopy was used to observe the dynamic adsorption behavior of GaN surfaces upon irradiation…
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Keywords:
oxidation;
gan surfaces;
h2o vapor;
surface ... See more keywords