A Rapid Method for Deposition of Sn-Doped GaN Thin Films on Glass and Polyethylene Terephthalate Substrates
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Electronic Materials"
DOI: 10.1007/s11664-017-5752-x
Abstract: We report the influence of Sn doping on microstructure, surface, and optical properties of GaN thin films deposited on glass and polyethylene terephthalate (PET) substrate. Sn-doped GaN thin films have been deposited by thermionic vacuum… read more here.
Keywords: thin films; gan thin; glass; glass polyethylene ... See more keywords
Structural, Morphological, and Optical Characterization of GaN/p-Si Thin Films for Various Argon Flow Rates
Sign Up to like & getrecommendations! Published in 2019 at "JOM"
DOI: 10.1007/s11837-019-03878-x
Abstract: A thin film of gallium nitride (GaN) was successfully grown onto p -Si by a radio-frequency (RF) magnetron sputter for different argon flows. X-ray diffraction (XRD) results proved that GaN thin film had a polycrystalline… read more here.
Keywords: argon flows; gan thin; thin film; microscopy ... See more keywords
Influence of nitrogen ion species on mass-selected low energy ion-assisted growth of epitaxial GaN thin films
Sign Up to like & getrecommendations! Published in 2019 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2019.143830
Abstract: Abstract The application of an energy and mass selected ion beam assisted deposition setup to investigate the influence of hyperthermal atomic and molecular nitrogen ion species during the initial stages of epitaxial GaN thin film… read more here.
Keywords: ion species; gan thin; nitrogen ion; ion ... See more keywords
Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films
Sign Up to like & getrecommendations! Published in 2020 at "Applied Physics Letters"
DOI: 10.1063/5.0003021
Abstract: The growth of high-quality epitaxial gallium nitride (GaN) thin films is achieved by using a baking and plasma pretreatment of the substrate prior to the GaN plasma-enhanced atomic layer deposition (PE-ALD). It is found that… read more here.
Keywords: thin films; plasma pretreatment; layer; gan thin ... See more keywords
Gallium nitride thin films by microwave plasma-assisted ALD
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DOI: 10.1364/ome.9.004187
Abstract: Synthesis and characterization of gallium nitride (GaN) thin films via microwave plasma-assisted atomic layer deposition (MPALD) is reported in this research. The GaN thin films grown by this technique were amorphous or nanocrystalline as it… read more here.
Keywords: thin films; gan thin; plasma assisted; gallium nitride ... See more keywords
Molecular Dynamics Simulation on B3-GaN Thin Films under Nanoindentation
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DOI: 10.3390/nano8100856
Abstract: The B3-GaN thin film was investigated by performing large-scale molecular dynamics (MD) simulation of nanoindentation. Its plastic behavior and the corresponding mechanism were studied. Based on the analysis on indentation curve, dislocation density, and orientation… read more here.
Keywords: loop; molecular dynamics; gan thin; simulation ... See more keywords