Design, modelling and characterization of comb drive MEMS gap-changeable differential capacitive accelerometer
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DOI: 10.1016/j.measurement.2020.108377
Abstract: Abstract This paper presents design optimization, numerical modelling, fabrication and characterization of a single-axis comb drive MEMS gap-changeable differential capacitive accelerometer with a compact footprint of 2 mm × 2 mm. High sensitivity is achieved by optimizing the ratio… read more here.
Keywords: mems gap; gap changeable; sensitivity; drive mems ... See more keywords