Enhancement of W Nanoparticles Synthesis by Injecting H2 in a Magnetron Sputtering Gas Aggregation Cluster Source Operated in Ar
Sign Up to like & getrecommendations! Published in 2024 at "Plasma Chemistry and Plasma Processing"
DOI: 10.1007/s11090-024-10499-z
Abstract: Synthesis of W nanoparticles by magnetron sputtering combined with gas aggregation operated in Ar suffers from a continuous decrease of the synthesis rate, ceasing in a finite time interval, in the range of minutes to… read more here.
Keywords: nanoparticles synthesis; gas aggregation; enhancement nanoparticles; magnetron sputtering ... See more keywords
Calorimetric investigations in a gas aggregation source
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Applied Physics"
DOI: 10.1063/1.5037413
Abstract: A gas aggregation source based on DC magnetron sputtering was investigated using a passive thermal probe and supplementary diagnostics (Langmuir probe and quartz crystal microbalance). Parameter variations of pressure, axial distance, and magnetron current have… read more here.
Keywords: microscopy; energy; gas aggregation; aggregation source ... See more keywords