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Published in 2023 at "Coatings"
DOI: 10.3390/coatings13050955
Abstract: Nonstoichiometric (Ti,Co)Ox coatings were prepared using gas-impulse magnetron sputtering (GIMS). The properties of coatings with 3 at.%, 19 at.%, 44 at.%, and 60 at.% Co content were compared to those of TiOx and CoOx films.…
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Keywords:
gas impulse;
influence content;
impulse magnetron;
magnetron sputtering ... See more keywords