Influence of Co-Content on the Optical and Structural Properties of TiOx Thin Films Prepared by Gas Impulse Magnetron Sputtering
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DOI: 10.3390/coatings13050955
Abstract: Nonstoichiometric (Ti,Co)Ox coatings were prepared using gas-impulse magnetron sputtering (GIMS). The properties of coatings with 3 at.%, 19 at.%, 44 at.%, and 60 at.% Co content were compared to those of TiOx and CoOx films.… read more here.
Keywords: gas impulse; influence content; impulse magnetron; magnetron sputtering ... See more keywords