Role of hydrogen treatment on microstructural and opto-electrical properties of amorphous ITO thin films deposited by reactive gas-timing DC magnetron sputtering
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DOI: 10.1007/s10854-017-6826-5
Abstract: Hydrogenated amorphous indium-tin-oxide (ITO) thin films have been prepared using reactive gas-timing DC magnetron sputtering technique, onto externally unheated glass substrate and without any heat treatment. In order to study the effect of hydrogen on… read more here.
Keywords: reactive gas; thin films; hydrogen; gas ... See more keywords