Impact of metal gate electrodes on electrical properties of Y2O3/Si0.78Ge0.22 gate stacks
Sign Up to like & getrecommendations! Published in 2019 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2019.05.005
Abstract: Abstract Electrical properties of Y2O3/SiGe metal-oxide-semiconductor (MOS) capacitors with Al, Au, W and TiN gate electrodes have been evaluated in order to study the impact of the metal gate electrodes on Y2O3/SiGe interface properties. It… read more here.
Keywords: electrical properties; properties y2o3; gate electrodes; impact metal ... See more keywords
High-Resolution Inkjet-Printed Oxide Thin-Film Transistors with a Self-Aligned Fine Channel Bank Structure.
Sign Up to like & getrecommendations! Published in 2018 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.8b02390
Abstract: A self-aligned inkjet printing process has been developed to construct small channel metal oxide (a-IGZO) thin-film transistors (TFTs) with independent bottom gates on transparent glass substrates. Poly(methylsilsesquioxane) was used to pattern hydrophobic banks on the… read more here.
Keywords: inkjet printed; bank structure; self aligned; thin film ... See more keywords
Top-down and sensitive indium oxide nanoribbon field effect transistor biosensor chips integrated with on-chip gate electrodes toward point of care applications.
Sign Up to like & getrecommendations! Published in 2018 at "Nanotechnology"
DOI: 10.1088/1361-6528/aad435
Abstract: We report a scalable, uniform, and sensitive top-down fabricated indium oxide (In2O3) nanoribbon biosensor platform with integrated on-chip gate electrodes using two photolithographic masks. The purpose of this on-chip gate electrode is to control the… read more here.
Keywords: indium oxide; biosensor; gate electrodes; chip gate ... See more keywords