General mathematical model for the period chirp in interference lithography.
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DOI: 10.1364/oe.481887
Abstract: We present a general analytical model for the calculation of the spatial distribution of the grating period, enabling the unification of all configurations of classical laser interference lithography (LIL) and scanning-beam interference lithography (SBIL) into… read more here.
Keywords: period; interference; general mathematical; model ... See more keywords