Surface profilometry using vortex beams generated with a spatial light modulator
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DOI: 10.1016/j.optcom.2018.07.003
Abstract: Abstract We present a common path interference setup for detection of surface depth differences of the order of 200 nm, using a vortex and a Gaussian beam generated with a spatial light modulator. The phase… read more here.
Keywords: using vortex; spatial light; generated spatial; surface ... See more keywords