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Published in 2017 at "Physics of the Solid State"
DOI: 10.1134/s1063783417050134
Abstract: The GeOx films and multilayer nanoperiodic Ge/SiO2 structures containing germanium nanocrystals were prepared by physical vapor deposition in vacuum. The properties of the films and multilayer structures were controlled by varying the deposition temperature in…
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Keywords:
geox films;
sio2 structures;
deposition;
germanium nanocrystals ... See more keywords