Nonstoichiometric amorphous silicon carbide films as promising antireflection and protective coatings for germanium in IR spectral range
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DOI: 10.1016/j.optmat.2018.12.012
Abstract: Abstract A technology for preparation of amorphous nonstoichiometric hydrogenated silicon carbide (a-SixC1-x:H) films using the PE-CVD method has been developed. Such films with refractive index n = 1.8–2.1 are suitable to obtain antireflection effect on germanium in… read more here.
Keywords: germanium spectral; germanium; sixc1 films; antireflection ... See more keywords