Kinetics of plasma oxidation of germanium-tin (GeSn)
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DOI: 10.1016/j.apsusc.2017.06.298
Abstract: Abstract The kinetics of plasma oxidation of GeSn at low temperature is investigated. The oxidation process is described by a power-law model where the oxidation rate decreases rapidly from the initial oxidation rate with increasing… read more here.
Keywords: oxidation; kinetics plasma; gesn; gesn oxide ... See more keywords