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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13111892
Abstract: A bonding process was developed for glass-to-glass fusion bonding using Borofloat 33 wafers, resulting in high bonding yield and high flexural strength. The Borofloat 33 wafers went through a two-step process with a pre-bond and…
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Keywords:
glass glass;
time;
applied force;
glass fusion ... See more keywords