Performance enhancement of TaOx resistive switching memory using graded oxygen content
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DOI: 10.1063/1.5048098
Abstract: We compared the resistive switching performances of built-in graded oxygen concentration TaOx films and uniform TaOx films under the 100 μA compliance current. The device with a graded oxygen concentration demonstrates increased low resistance and high… read more here.
Keywords: oxygen; graded oxygen; oxygen concentration; taox ... See more keywords