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Published in 2018 at "Journal of Engineering Physics and Thermophysics"
DOI: 10.1007/s10891-018-1831-y
Abstract: Parameters of the erosive laser plasma of a graphite target on exposure to Nd3+:YAG-laser pulses with a wavelength λ = 1064 nm and a pulse duration τ ~ 20 ns have been investigated. Two zones…
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Keywords:
laser;
graphite target;
laser plasma;
plasma graphite ... See more keywords
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Published in 2018 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2018.01.113
Abstract: Abstract In order to improve the tribological performance, a series of graphite-like carbon (GLC) films with different graphite target power densities were prepared by magnetron sputtering. The valence bond and microstructure of films were characterized…
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Keywords:
graphite target;
target power;
power density;
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Published in 2021 at "Plasma Sources Science and Technology"
DOI: 10.1088/1361-6595/ac3341
Abstract: Conventional magnetron discharge with a graphite target is a technology used worldwide to deposit thin films for a large range of applications. In the last decade, the high current density sputtering regime stands out as…
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Keywords:
current density;
density;
graphite target;
high current ... See more keywords