Littrow 3D measurement based on 2D grating dual-channel equal-optical path interference.
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DOI: 10.1364/oe.475830
Abstract: We propose a 3D measurement method based on 2D grating dual-channel and Littrow equal-optical path incidence to detect the 3D displacement of a 2D grating in the X-, Y-, and Z-directions. The 2D grating is… read more here.
Keywords: equal optical; channel; grating dual; optical path ... See more keywords