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   Articles with "grating interferometer" as a keyword



Integrated Micro Sensor Based on Grating Interferometer: A Review

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recommendations! Published in 2025 at "IEEE Sensors Journal"

DOI: 10.1109/jsen.2024.3507084

Abstract: Sensors based on optical interferometric displacement measurement have the outstanding advantage of high sensitivity and are widely applied in various measurement fields. In particular, with the development of micro-opto-electromechanical system technology, grating-interferometer-based sensors have drawn… read more here.

Keywords: micro sensor; grating interferometer; based grating; integrated micro ... See more keywords

A Reflective-Type Heterodyne Grating Interferometer for Three-Degree-of-Freedom Subnanometer Measurement

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recommendations! Published in 2022 at "IEEE Transactions on Instrumentation and Measurement"

DOI: 10.1109/tim.2022.3213005

Abstract: A heterodyne grating interferometer (HTGI) able to simultaneously measure the three-axis translational displacements of ultraprecision motion stages with a subnanometer resolution is demonstrated. The HTGI is composed of two main parts: a reflective planar grating… read more here.

Keywords: heterodyne; heterodyne grating; grating interferometer; measurement ... See more keywords

Achieving High-Fold Optical Subdivision of a Blazed Grating Interferometer Through Near-Littrow Incidence

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recommendations! Published in 2025 at "IEEE Transactions on Instrumentation and Measurement"

DOI: 10.1109/tim.2025.3588926

Abstract: The multidiffractions model is commonly used to increase the optical subdivision factor. However, in practical applications, as the diffraction order increases, this model requires the size of the mirror above the scale grating to be… read more here.

Keywords: blazed grating; optical subdivision; subdivision; model ... See more keywords

Polarization-modulated grating interferometer by conical diffraction.

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recommendations! Published in 2022 at "Optics express"

DOI: 10.1364/oe.438490

Abstract: The grating interferometer in the Littrow configuration uses quarter wave plates (QWPs) to modulate the polarization in the measurement system to determine the autocollimation optical path. Fabrication errors and mounting errors of the QWPs lead… read more here.

Keywords: modulated grating; polarization modulated; polarization; conical diffraction ... See more keywords

Double-Diffracted Spatially Separated Heterodyne Grating Interferometer and Analysis on its Alignment Tolerance

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recommendations! Published in 2019 at "Applied Sciences"

DOI: 10.3390/app9020263

Abstract: An optical configuration of double-diffracted spatially separated heterodyne grating interferometer with a mechanical fixture was designed. To further investigate its features and provide robust measurements, the alignment tolerance in double-diffracted spatially separated heterodyne grating interferometer… read more here.

Keywords: spatially separated; double diffracted; heterodyne grating; separated heterodyne ... See more keywords