A Reflective-Type Heterodyne Grating Interferometer for Three-Degree-of-Freedom Subnanometer Measurement
Sign Up to like & getrecommendations! Published in 2022 at "IEEE Transactions on Instrumentation and Measurement"
DOI: 10.1109/tim.2022.3213005
Abstract: A heterodyne grating interferometer (HTGI) able to simultaneously measure the three-axis translational displacements of ultraprecision motion stages with a subnanometer resolution is demonstrated. The HTGI is composed of two main parts: a reflective planar grating… read more here.
Keywords: heterodyne; heterodyne grating; grating interferometer; measurement ... See more keywords
Polarization-modulated grating interferometer by conical diffraction.
Sign Up to like & getrecommendations! Published in 2022 at "Optics express"
DOI: 10.1364/oe.438490
Abstract: The grating interferometer in the Littrow configuration uses quarter wave plates (QWPs) to modulate the polarization in the measurement system to determine the autocollimation optical path. Fabrication errors and mounting errors of the QWPs lead… read more here.
Keywords: modulated grating; polarization modulated; polarization; conical diffraction ... See more keywords
Double-Diffracted Spatially Separated Heterodyne Grating Interferometer and Analysis on its Alignment Tolerance
Sign Up to like & getrecommendations! Published in 2019 at "Applied Sciences"
DOI: 10.3390/app9020263
Abstract: An optical configuration of double-diffracted spatially separated heterodyne grating interferometer with a mechanical fixture was designed. To further investigate its features and provide robust measurements, the alignment tolerance in double-diffracted spatially separated heterodyne grating interferometer… read more here.
Keywords: spatially separated; double diffracted; heterodyne grating; separated heterodyne ... See more keywords