Echelle gratings tiling method based on lateral shearing interferometry
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DOI: 10.1016/j.optlastec.2021.107475
Abstract: Abstract A method for echelle gratings tiling based on lateral shearing interferometry is proposed. Fringe patterns of the grating assembly are generated by a wedge plate. Mosaic errors can be calculated and corrected by observing… read more here.
Keywords: lateral shearing; echelle gratings; method; shearing interferometry ... See more keywords