Articles with "grayscale photolithography" as a keyword



Reconfigurable phase-change photomask for grayscale photolithography

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Published in 2017 at "Applied Physics Letters"

DOI: 10.1063/1.4983198

Abstract: We demonstrate a grayscale photolithography technique which uses a thin phase-change film as a photomask to locally control the exposure dose and allows three-dimensional (3D) sculpting photoresist for the manufacture of 3D structures. Unlike traditional… read more here.

Keywords: grayscale photolithography; phase; phase change; photomask ... See more keywords

Three-Dimensional Soft Material Micropatterning via Grayscale Photolithography for Improved Hydrophobicity of Polydimethylsiloxane (PDMS)

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Published in 2022 at "Micromachines"

DOI: 10.3390/mi13010078

Abstract: In this present work, we aim to improve the hydrophobicity of a polydimethylsiloxane (PDMS) surface. Various heights of 3D PDMS micropillars were fabricated via grayscale photolithography, and improved wettability was investigated. Two approaches of PDMS… read more here.

Keywords: hydrophobicity; hydrophobicity polydimethylsiloxane; polydimethylsiloxane pdms; grayscale photolithography ... See more keywords