Novel pathways for elimination of chlorine atoms from growing Si(100) surfaces in CVD reactors
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DOI: 10.1016/j.apsusc.2018.02.035
Abstract: Abstract Reactions leading to elimination of chlorine atoms from growing Si(100) surfaces were simulated using clusters of silicon atoms of different sizes and shapes, and at the UB3LYP/6–31 g(d,p) level of theory. The reactions of type… read more here.
Keywords: chlorine atoms; atoms growing; growing 100; elimination chlorine ... See more keywords