Structure and Electron Mobility of ScN Films Grown on α-Al2O3(11¯02) Substrates
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DOI: 10.3390/ma11122449
Abstract: Scandium nitride (ScN) films were grown on α-Al2O3(11¯02) substrates using the molecular beam epitaxy method, and the heteroepitaxial growth of ScN on α-Al2O3(11¯02) and their electric properties were studied. Epitaxial ScN films with an orientation… read more here.
Keywords: grown al2o3; mobility; scn films; scn ... See more keywords