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Published in 2019 at "Semiconductor Science and Technology"
DOI: 10.1088/1361-6641/ab4b93
Abstract: InGaN quantum dots (QDs) were grown by metalorganic chemical vapor deposition (MOCVD) and shown to exhibit a bimodal size distribution. Atom probe tomography (APT) was used to characterize the dots in conjunction with atomic force…
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Keywords:
metalorganic chemical;
chemical vapor;
vapor deposition;
ingan quantum ... See more keywords