Crystal growth and evaluation of nitrogen and aluminum co-doped N-type 4H-SiC grown by physical vapor transport
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DOI: 10.1016/j.jcrysgro.2018.06.019
Abstract: Abstract N-type 4H-SiC crystals were grown by the physical vapor transport (PVT) method with nitrogen and aluminum (N–Al) co-doping. By using aluminum carbide powder preannealed in nitrogen gas atmosphere as an aluminum doping source, we… read more here.
Keywords: nitrogen; physical vapor; vapor transport; grown physical ... See more keywords