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Published in 2017 at "Superlattices and Microstructures"
DOI: 10.1016/j.spmi.2017.02.012
Abstract: Abstract A large amount of huge hexagonal hillocks were observed on the surface of N-polar GaN film grown on c-plane sapphire substrate by MOCVD. The distribution of residual stress and dislocation density in a typical…
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Keywords:
polar gan;
grown plane;
hillock;
residual stress ... See more keywords
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Published in 2021 at "Superlattices and Microstructures"
DOI: 10.1016/j.spmi.2021.106845
Abstract: Abstract κ-gallium oxide (Ga2O3) layers were hetero-epitaxially grown on c-plane sapphire substrates by halide vapor phase epitaxy (HVPE). Pure (001)-oriented κ-Ga2O3 with high crystal quality was obtained with this method on sapphire at 800 °C. Furthermore,…
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Keywords:
grown plane;
ga2o3 layers;
ga2o3;
sapphire ... See more keywords