Enhanced piezoelectricity of thin film hafnia-zirconia (HZO) by inorganic flexible substrates
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DOI: 10.1063/1.5031134
Abstract: Hf0.5Zr0.5O2 (HZO) films are grown on rigid glass and flexible polyimide substrates using non-rapid thermal annealing. Films are comparatively investigated using macroscopic and local probe-based approaches to characterize their ferroelectric and piezoelectric properties. The polarization-electric… read more here.
Keywords: flexible substrates; thin films; grown rigid; hzo ... See more keywords