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Published in 2018 at "Scripta Materialia"
DOI: 10.1016/j.scriptamat.2018.01.035
Abstract: Abstract The solid state reaction between Cu and a-Si films was investigated at 150–200 °C by depth profiling with secondary neutral mass spectrometry. Intermixing was observed leading to the formation of a homogeneous Cu 3 Si…
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Keywords:
growth cu3si;
transition;
parabolic growth;
linear parabolic ... See more keywords