Carbon monoxide concentrations in a Czochralski growth furnace
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DOI: 10.1016/j.jcrysgro.2020.126015
Abstract: Abstract High-performance power devices require silicon crystals with long minority carrier lifetimes and, subsequently, low carbon concentrations. This paper reports in-situ measurements of carbon monoxide (CO) in a Czochralski growth furnace used for the growth… read more here.
Keywords: czochralski growth; carbon; growth furnace; carbon monoxide ... See more keywords