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Published in 2017 at "Semiconductors"
DOI: 10.1134/s1063782617100189
Abstract: The growth of Ge nanocrystals in SiO2 films is studied in relation to the dose of implanted Ge+ ions and the annealing temperature at a pressure of 12 kbar. It is established that the dependences…
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Keywords:
growth nanocrystals;
diffusion;
nanocrystals sio2;
sio2 films ... See more keywords