Effects of growth orientations and epitaxial strains on phase stability of HfO2 thin films
Sign Up to like & getrecommendations! Published in 2019 at "Physical Review Materials"
DOI: 10.1103/physrevmaterials.3.054404
Abstract: The discovery of ferroelectricity in both pure and doped HfO$_2$-based thin films have revitalized the interest in using ferroelectrics for nanoscale device applications. To take advantage of this silicon-compatible ferroelectric, fundamental questions such as the… read more here.
Keywords: ferroelectricity; growth orientations; thin films; orientations epitaxial ... See more keywords