Reduction of threading screw dislocations in 4H-SiC crystals by a hybrid method with solution growth and physical vapor transport growth
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DOI: 10.1016/j.jcrysgro.2021.126189
Abstract: Abstract The propagation of defects during the hybrid growth, which combines solution growth and physical vapor transport (PVT) growth, for bulk 4H-polytype silicon carbide was examined. During solution growth, more than 80% of the threading… read more here.
Keywords: growth; growth physical; physical vapor; solution growth ... See more keywords