Selective growth of vanadium dioxide on patterned Al/SiO2 substrate by metal-organic chemical vapor deposition
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DOI: 10.1039/d4ce00315b
Abstract: The area-selective growth of vanadium dioxide can provide a valuable self-aligned process promising for novel oxide electronics compatible with the silicon technology. In the present paper vanadium dioxide films were... read more here.
Keywords: growth vanadium; vanadium dioxide; vanadium; selective growth ... See more keywords