Frequency-Modulated MEMS Gyroscopes: A Review
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DOI: 10.1109/jsen.2021.3117939
Abstract: As a high-precision angular rate sensor, the Frequency-Modulated (FM) gyroscope based on MEMS craft has attracted more and more attention in recent years, owing to its advantages in low power consumption, low temperature sensitivity, very… read more here.
Keywords: mems gyroscopes; frequency; modulated mems; gyroscope ... See more keywords