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Published in 2017 at "Journal of The European Ceramic Society"
DOI: 10.1016/j.jeurceramsoc.2016.09.017
Abstract: Abstract Highly oriented β-SiC bulks with high hardness were fabricated by halide laser chemical vapor deposition (HLCVD) using SiCl 4 , CH 4 and H 2 as precursors. The effects of total pressure ( P…
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Keywords:
sic bulks;
highly oriented;
laser chemical;
deposition ... See more keywords
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Published in 2020 at "Materials"
DOI: 10.3390/ma13020410
Abstract: Doping of nitrogen is a promising approach to improve the electrical conductivity of 3C-SiC and allow its application in various fields. N-doped, -oriented 3C-SiC bulks with different doping concentrations were prepared via halide laser chemical…
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Keywords:
laser chemical;
110 oriented;
deposition;
chemical vapour ... See more keywords