Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography
Sign Up to like & getrecommendations! Published in 2023 at "Applied Physics Letters"
DOI: 10.1063/5.0144684
Abstract: Grayscale lithography allows the creation of micrometer-scale features with spatially controlled height in a process that is fully compatible with standard lithography. Here, solid immersion lenses are demonstrated in silicon carbide using a fabrication protocol… read more here.
Keywords: lithography; hard mask; immersion lenses; solid immersion ... See more keywords
The Role of Oxygen on Anisotropy in Chromium Oxide Hard Mask Etching for Sub-Micron Fabrication
Sign Up to like & getrecommendations! Published in 2021 at "IEEE Transactions on Nanotechnology"
DOI: 10.1109/tnano.2020.3038737
Abstract: Chromium and its oxides have been playing a vital role in the fabrication of micro- and nano-scale structures in numerous applications for several decades. Controllable, robust and anisotropically dry-etched hard masks and their optimal etch… read more here.
Keywords: chromium oxide; hard mask; etch; chromium ... See more keywords
Fabrication of Dimensional and Structural Controlled Open Pore, Mesoporous Silica Topographies on a Substrate
Sign Up to like & getrecommendations! Published in 2022 at "Nanomaterials"
DOI: 10.3390/nano12132223
Abstract: Open pore mesoporous silica (MPS) thin films and channels were prepared on a substrate surface. The pore dimension, thickness and ordering of the MPS thin films were controlled by using different concentrations of the precursor… read more here.
Keywords: hard mask; open pore; methodology; mesoporous silica ... See more keywords