Determining the Nonlinear Motion of MEMS Gyroscopes Using the Harmonic Balancing Method
Sign Up to like & getrecommendations! Published in 2021 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2021.3078320
Abstract: In this paper, the usability of the classical Harmonic Balancing method (cHB) to calculate the weakly nonlinear motion of phase- and amplitude controlled MEMS resonators is demonstrated. A polynomial mechanical stiffness description and linearized electrostatic… read more here.
Keywords: nonlinear motion; harmonic balancing; method; balancing method ... See more keywords