Controlling plasma properties under differing degrees of electronegativity using odd harmonic dual frequency excitation
Sign Up to like & getrecommendations! Published in 2017 at "Plasma Sources Science and Technology"
DOI: 10.1088/1361-6595/aa8dcd
Abstract: The charged particle dynamics in low-pressure oxygen plasmas excited by odd harmonic dual frequency waveforms (low frequency of 13.56 MHz and high frequency of 40.68 MHz) are investigated using a one-dimensional numerical simulation in regimes… read more here.
Keywords: dual frequency; plasma; harmonic dual; odd harmonic ... See more keywords