AlN piezoelectric thin films for energy harvesting and acoustic devices
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DOI: 10.1016/j.nanoen.2018.06.062
Abstract: Abstract Aluminum nitride (AlN) thin films are widely investigated due to their unique physical properties and applications in energy harvesting devices, ultrasonic transducers, microelectronics, high-frequency wide band communications, and power semiconductor devices. This article reviews… read more here.
Keywords: thin films; energy; aln; harvesting acoustic ... See more keywords