Design and Fabrication of a Novel Poly-Si Microhotplate with Heat Compensation Structure
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DOI: 10.3390/mi13122090
Abstract: I Microhotplates are critical devices in various MEMS sensors that could provide appropriate operating temperatures. In this paper, a novel design of poly-Si membrane microhotplates with a heat compensation structure was reported. The main objective… read more here.
Keywords: compensation structure; heat compensation; temperature; poly ... See more keywords