Low Power Thermal Tuning in Resonant Vertical Junction Silicon Modulators Through Substrate Removal
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DOI: 10.1109/jphot.2018.2824026
Abstract: We report on thermally tunable modulators, with efficiencies up to 2.16 nm/mW. Efficient performance was accomplished through integrated heater design and Si substrate removal, where the heavily N+ doped Si heater element is integrated into the… read more here.
Keywords: power thermal; thermal tuning; removal; heater design ... See more keywords