Sub-nanometer heating depth of atomic layer annealing
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DOI: 10.1016/j.apsusc.2020.146615
Abstract: Abstract Conventional annealing techniques face tremendous challenges in nanoscale fabrication. For example, the heating depth of conventional annealing techniques is much greater than the critical dimension of nanoscale devices, resulting in excessive thermal budget and… read more here.
Keywords: atomic layer; heating depth; layer annealing; nanometer heating ... See more keywords